The authors have recently developed a far ultraviolet (FUV) attenuated total reflection (ATR) spectrometer that holds unique promise for the analysis of aqueous solutions. The device is capable of measuring n→σ* transition absorption band of water, which is highly sensitive to minute changes in concentrations of hydrated salts and solutes. The authors have also developed an inexpensive compact FUV spectrometer for on-site application in industrial processes. This review paped up in the fiedl of FUV spectroscopy.