Development of an automatic modeling system for reaction mechanisms in CVD processes using bio-inspired algorithms

Abstract

We developed an automatic modeling system that analyzes experimental data on the cross-sectional shapes of films deposited on substrates with nanometer- or micrometer-sized trenches. The system identifies a suitable reaction model to describe the film deposition. The inference engine used by the system to model the reaction mechanism was designed using bio-inspired algorithms. We studied the effect of the bio-inspired algorithms on the system.