Proceedings of the Symposium on Chemoinformatics
38th Symposium on Chemoinformatics, Tokyo
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Host: Division of Chemical Information and Computer Science, The Chemical Society of Japan

Co-host: The Pharmaceutical Society of Japan, Japan Society for Bioscience, Biotechnology, and Agrochemistry, The Japan Society for Analytical Chemistry, Society of Computer Chemistry, Japan

Poster Session
Development of a calculation method of deposition profiles in chemical vapor deposition reactors using bio-inspired algorithms
*Takahiro Takahashi, Motoki Suzukawa, Junichi Kodama, Yoshiori Ema
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Keywords: chemical vapor deposition (CVD), growth rate, thin film, bio-inspired algorithms (BIA)
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Pages 122-123

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Abstract
We developed a calculation method to reproduce the deposition profiles in chemical vapor deposition reactors using bio-inspired algorithms. In addition, we evaluated the algorithms using both the median and the quartile deviation of the convergence values of the fitness function and average calculation time. REX-star+JGG showed overall the best performance among the algorithms from the aspects of accuracy, convergence stability and calculation time.
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