Proceedings of JIEP Annual Meeting
The 19th JIEP Annual Meeting
Session ID : 17B-04
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Host: Japan Institute of Electronics Packaging

The electrical property of Feed-throughs in Silicon substrate
*Kouhei Matsumaru, Satoshi Yamamoto, Tatsuo Suemasu, Mikio Hashimoto
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Keywords: Feed-throughs in Silicon substrate
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[in Japanese]
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© 2005 by The Japan Institute of Electronics Packaging
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