Proceedings of JIEP Annual Meeting
The 17th JIEP Annual Meeting
Session ID : 14C-09
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Host: japan institute of electronics packaging

Fabrication and packaging of MEMS mirror array
*Renshi Sawada, Eiji Higurashi, Johji Yamaguchi, Akira Shimizu, Tsuyoshi Yamamoto, Nobuyuki Takeuchi, Yuji Uenishi
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Keywords: MEMS mirror, Packaging, Bonding, Single crystal silicon, Terraced electrode
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[in Japanese]
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© 2003 by The Japan Institute of Electronics Packaging
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