The 21th JIEP Annual Meeting
Session ID : 16B-11
Conference information
High aspect ratio micro fabrication of PTFE by synchrotron radiation light stimulation etching
*Shigeaki Yamamoto, Yoshiaki Ukita, Mitsuyoshi Kishihara, Kouzou Mochiji, Yuichi Utsumi
Author information
Keywords:
PTFE
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