Proceedings of JIEP Annual Meeting
The 24th JIEP Annual Meeting
Session ID : 12B-08
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Host: Japan Institute of Electronics Packaging

The 24th JIEP Annual Meeting
Electrode structure for ferroelectric thin films and application to nanotransfer method
*Toshifumi Hosono, Keita Iimura, masaaki Ichiki, Toshihiro Itoh, Tadatomo Suga
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Keywords: thin film, embedded capacitor, lead-free
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[in Japanese]
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© 2010 The Japan Institute of Electronics Packaging
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