Proceedings of JIEP Annual Meeting
The 25th JIEP Annual Meeting
Session ID : 10C-07
Conference information

Host: Japan Institute of Electronics Packaging

The 25th JIEP Annual Meeting
Micro-patterning of thick siloxane films by proton beam writing
*Keisuke Saito, Ryutaro Tsuchiya, Hiroyoki Nisikawa, Hideomi Hayashi
Author information
Keywords: proton beam, siloxane, optical device
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (476K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2011 The Japan Institute of Electronics Packaging
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top