Proceedings of JIEP Annual Meeting
The 25th JIEP Annual Meeting
Session ID : 10C-15
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Host: Japan Institute of Electronics Packaging

The 25th JIEP Annual Meeting
Mist-ejection of Si microparticles using Si nozzles by anisotropic etching
*Yoshinori Yokoyama, Takaaki Murakami, Takashi Tokunaga, Toshihiro Itoh
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Keywords: Mist-jet technology, Anisotropic etching, Si microparticles, Si nozzle
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[in Japanese]
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© 2011 The Japan Institute of Electronics Packaging
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