Patterning of Aligned CNT Films Using SiO₂ Particles Monolayer as a Mask

Abstract

We developed a new simple method to fabricate periodic CNTs array. The new method has a series of processes, which consists of forming monolayer of SiO₂ particles on close-packed-CNT film formed by surface decomposition of SiC, Pt deposition, removing of the SiO₂ particles and heat treatment in the air. This method enables us to fabricate the periodic CNTs array without expensive apparatuses and complicated processes. [DOI: 10.1380/ejssnt.2012.198]