4D-Data Acquisition in Scanning Confocal Electron Microscopy for Depth-Sectioned Imaging

Abstract

We propose an experimental depth-sectioned imaging method based on annular dark-field scanning confocal electron microscopy (ADF-SCEM). Four-dimensional (4D) datasets, consisting of 2D probe images taken at every probe position during 2D raster scanning, were acquired with an aberration-corrected scanning transmission electron microscope. A series of depth-sectioned images were constructed by processing a single 4D dataset. A pinhole and a stage-scan system used in earlier studies were not required in the present data acquisition. Optimal observation conditions for the 4D data acquisition in the ADF-SCEM mode are outlined from multislice simulations. [DOI: 10.1380/ejssnt.2018.247]