Fast Phase Retrieval from Reflection High Energy Electron Diffraction Intensities during Growth

Abstract

A fast phase retrieval approach from reflection high energy electron diffraction (RHEED) intensities is proposed for monitoring growing surfaces almost in real time. The approach is based on a hybrid input-output algorithm and the processing time is reduced in two ways by taking peculiarities to RHEED intensities during growth. One is to reduce the number of sampling points along the incident beam direction in which the number is much larger than that in the normal direction due to grazing incidence of the beam. The other is to reduce the number of iterations in the retrieving process. The resulting real space objects are well reproduced providing surface morphology during growth approximately in 0.1 s. [DOI: 10.1380/ejssnt.2018.97]