Development of Mass-controlled Ion Beam through a Vacuum Electrospray Method

Abstract

Generally, focused ion beams are generated via the ionization process of liquid metal ion sources (LMISs); the LMIS components are made from pure liquid metals or alloys. Because of high operating cost associated with LMISs, suitable alternatives for a low-cost ion beam source must be explored. In this study, a Co nitrate solution containing ethanol and 2-(2-butoxyethoxy) ethanol solvent was prepared to form an ion source containing metallic ions. The Co-contained ion beams are generated through a vacuum electrospray method. I estimated the mass-controlled ion beams using rotating electric field mass analyzers (REFMS). I focused on three mass-controlling states at typical frequencies (300, 350, and 400 kHz). The distributions of the Co image indicate the successful generation of a mass-controlled ion beam. This mass-controlling system will allow for elemental-driven fabrication processs governed by the periodic law via REFMS.