2005 Volume 3 Pages 345-349
Polarization curve of titanium was measured in sulfuric acid solution. Titanium films were treated at different electrochemical potentials and then were investigated by means of spectroscopic ellipsometry. The thickness of anodized films decreased in air within 280 min over 500 mV vs. Ag/AgCl. The parameters tan Ψ and cos Δ in spectroscopic ellipsometry were in a good agreement with the polarization curve and the thickness of anodized films respectively. Due to the density decrease of anodized titanium films, that was to say, the change to a more porous structure, both the refractive index and the extinction coefficient of the composite film of anodized film and titanium substrate decreased with the increase of the treated potentials at a fixed wavelength over 350 nm. [DOI: 10.1380/ejssnt.2005.345]