2008 Volume 6 Pages 68-71
For developing electron microscopes mounted with a single-atom electron source, we constructed a practical gun chamber of an extreme high vacuum (XHV), and demonstrated excellent characteristics of its emission beams; the stable beam with the current fluctuation of ∼0.8 % was observed at the total current of 20 nA in the XHV of 1 × 10-9 Pa. [DOI: 10.1380/ejssnt.2008.68]