Fabrication of the Fe₂O₃:ZnO Based Nanostructured Sensor for LPG Detection

Abstract

This study aimed to develop a high-performance liquefied petroleum gas (LPG) sensor based on the Fe₂O₃:ZnO material. A solid-state synthesis of the ceramic target with Fe₂O₃ and ZnO nanopowders is presented. LPG sensing nanostructured films were obtained by the high-frequency magnetron sputtering method. The thickness and surface morphology of the sensing layers were determined by thickness measuring profilometer and scanning electron microscope, respectively. The crystallographic properties and elemental mapping analysis of the Fe₂O₃:ZnO material were investigated by transmission electron microscopy. Energy-dispersive X-ray elementary analysis highlighted the presence of single elements available in the Fe₂O₃:ZnO material. Further, a chemo-resistive sensor based on a thin film of the Fe₂O₃:ZnO nanostructure was fabricated onto the Multi-Sensor-Platform, and its gas sensing properties were investigated towards LPG. The sensor with Pd catalytic particles showed the highest gas response at 200°C. The LPG sensing parameters like sensor response and response/recovery times were investigated at different operating temperatures. The minimum response and recovery times of the sensor corresponding to an LPG concentration of 2000 ppm were found to be 26 and 15 s, respectively. The investigated sensing parameters demonstrate that the fabricated LPG sensor based on the Fe₂O₃:ZnO semiconductor nanostructures is challenging for the detection of low concentrations of LPG at relatively low temperatures.