PCb01 赤外エリプソメトリによる配向膜評価の検討

抄録

We investigated infrared ellipsometry as a new technique to characterize molecular orientation of rubbed polyimide film. In polarization spectra of reflected infrared beam from rubbed polyimide film on glass substrate, characteristic structures corresponding vibrations of -O-, C-N-C and benzene. Anisotropy of polarization was also observed at the wavenumber corresponding vibrations of C-O-C, C-N-C and benzene. It is expected that infrared reflection ellipsometry can determine polyimide molecular orientation by combining with reflection ellipsometry of visible light.