Abstract
Novel surface profiler system for inspection of the display components is demonstrated. In the case of the liquid crystal display, for example, not only the flatness of the alignment film but also the quality of rubbing can be inspected. This instrument is applicable for EL glass substrate as well as LCD and PDP. To visualize the shape of the back plane, no preparatory treatment (viz. remove the alignment film) is required. That is, in-line panel inspection of the real product can be realized.
