Alignment of Nematic Liquid Crystal Molecules Using Nanometer-Sized Ultra-Fine Patterns By Electron Beam Exposure Method

Abstract

We have investigated an alignment of nematic liquid crystal (NLC) molecules using nanometer-sized ultra-fine groove, tilt, and dot patterns fabricated by electron beam exposure method. In order to improve a wetting condition of NLCs, we sputtered silicon di-oxide on a substrate after fabrication of ultra-fine patterns. For a homogeneous alignment cell with ultra-fine groove pattern, azimuthal anchoring energy of 2.48*10^-4 J/m^2 was obtained. We also confirmed tilt and homeotropic alignment using tilted and dot patterns, respectively.