Optical Anisotoropy and Alignment Properties of Alignment Films Exposed to Ion Beam

Abstract

Recently, a new method of non-contact alignment has been proposed ion beam (IB) bombardment on diamond like carbon (DLC). And the new technology (DLC/IB) is applied for monochrome IPS-LCD for medical use. We investigated the optical anisotoropy on DLC thin film exposed to IB by reflection ellipsometry. The experimental results are well consistent with a simple theoretical model. The optical anisotoropy, anchoring energy and pretilt angle on several inorganic and polymer films exposed to IB were measured. The relation between optical anisotropy and alignment properties for IB method is discussed.