PA39 Study on LC alignment property on SiOxNy thin film

Abstract

A high-performance LC projector, which uses a vertical alignment (VA) LC display mode, is now becoming an inevitable device for displaying extra large-size images. Stable LC alignment of LC devices against intensive light illumination is essential to make high-reliable LC projectors. In this study, we have studied vertically LC alignment control on nitrogenated SiOx (SiOxNy) for getting more stable vertical LC alignment. The results prove that VHR is improved by introducing nitrogen into SiO layer, while the vertical anchoring property is weakened with increasing the content of nitrogen in SiO.