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*R. Hanaoka
Fujisawa Research Laboratory, Tokuyama Soda Corporation
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S. Takeno
Fujisawa Research Laboratory, Tokuyama Soda Corporation
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G. Taga
Fujisawa Research Laboratory, Tokuyama Soda Corporation
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S. Matsumoto
Electron Device Engineering Laboratory, Toshiba Corporation
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H. Hato
Electron Device Engineering Laboratory, Toshiba Corporation
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S. Kondo
Electron Device Engineering Laboratory, Toshiba Corporation