Abstract
The Scanning Probe Microscope(SPM), invented by Binnig et al. (1981), is operable in a air, gas, liquid, or, vacuum state environment. The SPM used in the measurements was the Seiko Instruments SPI3700/SPA300 system. We wouid now like to report on study of the SPM(AFM,FFM) characteristics in relation to Polyimide Films from the viewpoint of system development.