Abstract
We have determined the molecular orientation of rubbed and unrubbed polyimide films on quartz glass substrates by measuring the optical retardation. We measured it in a transmission geometry as a function of incident angle. The molecular orientation was determined by fitting the experimental results with the theoretical calculation. Since the optical retardation is caused by both the anisotropy of and the multiple reflection in the polyimide film, we calculated the optical retardation by a transfermatrix method. Using the Vuks' relation, we obtained the molecular orientation of the polyimide films. It was compared with the molecular orientation of polyimide films on Si substrates that was determined by IR absorption.