1999 Volume 67 Issue 12 Pages 1237-1239
CdS thin films were fabricated on ITO-covered glass by successive ionic layer adsorption and reaction (SILAR) technique. The thickness of the CdS thin films increased with increasing the number of SILAR cycles. However, it was about 1/3 of the thickness expected from the ideal deposition process. The surface roughness increased as growth of CdS thin films. To increase the film thickness and to reduce the film roughness, we tried to change counter ions of cadmium ion source solution and to add chelating agent to the solution. In case of using CdCl2 and triethanolamine, the film thickness was increased and the surface roughness was reduced.