2001 Volume 69 Issue 10 Pages 764-768
Metal oxide thin films such as TiO2, ZrO2 and ZrTiO4 were fabricated from metal oxide precursor solutions by a dip-coating method, and were tested as hydrocarbon gas sensors. The solutions were prepared by the dehydration and polymerization processes of metal alkoxides in a benzene-butanol-water solution. This preparation method of the precursor solution was named “advanced sol-gel method”. The transparent surface of ZrO2 film was homogeneous and uniform. The similar morphology was observed on other oxide films. When these films were tested as hydrocarbon gas sensors, TiO2 film showed good response and sensitivity. It exhibited better sensitivity to propane than to methane. The response and recovery times for both gases were less than 30 sec at 500°C.
