MEMS/NEMS-based Devices for Bio-measurements

Abstract

Recently, the development of fabrication technology has simplified the construction of micro/nano electrical-mechanical systems (MEMS/NEMS). For example, bottom-up techniques allowing the deposition of atoms and molecules to fabricate nanostructures have been studied. Molecular self-assembly using biomolecules has become an important process for the fabrication of nanostructures through bottom-up techniques. Of the various biomolecules, DNA has several advantages such as ease of synthesis, and well-developed cut-and-paste techniques that are suitable for nanostructure fabrication. Also, analytical methods that enable detection of the activity of living cells and biomolecules are critical for biomedical sensing applications because these substrates are the basis of life. MEMS/NEMS technologies enable the micro/nanometer-scale construction of many types of devices and thus hold great potential for biotechnology and biomedical sensing applications. Consequently, numerous studies have been performed using cell-based micro-devices based on MEMS/NEMS technologies. BioMEMS/NEMS devices will become powerful tools for the measurement of biological and biomedical functions.