2019 Volume 13 Issue 1 Pages 47-57
In recent years, high intensity ultrasound has been widely used in medical and the industrial applications, However, the sound field could not be measured because the electrode or piezoelectric vibrator of the hydrophone was damaged by acoustic cavitation. Therefore, we have developed a tough hydrophone that can be used for measurement without damage even in high intensity ultrasound fields with the occurrence of acoustic cavitation. In this paper, the tough hydrophone for measuring high intensity ultrasound with the occurrence of acoustic cavitation is reported. This hydrophone is fabricated by hydrothermally deposition of a PZT polycrystalline film on the back surface of a titanium front plate and the use of titanium backing.