抄録
A new sample preparation method using a focused ion beam has been developed, as a preparation technique of cross-section for examining the internal structure of paper materials. However, a number of streaks on the cross-section was sometimes generated during irradiation of the beam. From the model experiments using smooth and rough surface films like polyethylene terephthalate or vinyl chloride, the streaks were found to run from a tip of deep micro clacks on the rough surface of the samples. Thin protective layer of tungsten, platinum, or carbon deposited on the rough surface of materials was pronouncedly effective to control of generation of the streaks. In this study, most suitable combination of platinum and carbon for formation of the effective thin layer was discussed from a view point of a practical time period of the effective layer formation.
