The evaluation of chemical contamination control by low out-gassing paints in the cleanroom

Abstract

The organic compounds contamination control in the cleanroom had been recognized as the important problem of the semiconductor and liquid crystal display manufacturing environment. We developed the low out-gassinng epoxy resin paint and acrylic emulsion paint used as the interior material of the cleanroom and examined their total hydrocarbon(THC) gas emission characterisitics. As a result of the investigation, THC gas emission rate from the improved paint was reduced than the normal paint, And we confirmed that the low out-gassing paint was effective for the organic contamination control in the cleanroom.