Abstract
The organic compounds contamination control in the cleanroom had been recognized as the important problem of the semiconductor and liquid crystal display manufacturing environment. We developed the low out-gassinng epoxy resin paint and acrylic emulsion paint used as the interior material of the cleanroom and examined their total hydrocarbon(THC) gas emission characterisitics. As a result of the investigation, THC gas emission rate from the improved paint was reduced than the normal paint, And we confirmed that the low out-gassing paint was effective for the organic contamination control in the cleanroom.
