Improvement of analysis of the Inner-shell Ionization Spectrum Analysis with Fuzzy Inference

Abstract

XPS(X-ray Photoelectron Spectroscopy) is a technique to evaluate the composition of surface neighborhood of material often used for material development. In recent years, it is applied to analyses of organism and biomolecule. In the present study, it proposes a new technique that uses a quantum-chemistry calculation and a fuzzy inference as a theoretical tool for details and a highly accurate analysis of this photoelectron spectrum and the effectiveness of the technique was examined that an inner shell electronic spectrum of tens of well known organic molecule is applied. We perform the calculations of inner shell electron binding energy for 15 organic molecules and these calculated values are good agreement with experimental results by fuzzy regression analysis, which are better than the previous work.