Abstract
In-situ isotopic analysis is a powerful tool for understanding the formation of the solar system. To accomplish sub-micron spacial resolution analysis, we have developed a laser post-ionization Secondary Neutrals Mass Spectrometer (SNMS). The performance evaluation with a lead sample has shown that as compared to the ionization with the ion beam alone, the laser irradiation to the sputtered materials increases the ion signals more than 10,000 times.