Chemical quantitative analysis of heulandite by SEM-EDS -The evaluation of thermal effect in beam damage-

Abstract

The chemical composition of zeolite has been estimated by wet analysis methods such as gravimetric method and the titration method, but in recent years, analysis by electron probe microanalysis (EPMA), which is a standard method for local chemical quantitative analysis, has also been performed. However, EPMA analysis involves continuously irradiating a narrow electron beam onto a small area, which may cause sample damage such as structural changes due to dehydration and evaporation of elements. Zeolite is one of the materials that is particularly sensitive to damage from beam irradiation, and in order to obtain reliable chemical quantitative values, it is necessary to reduce beam damage. Ishihara and Ohfuji (2024, Annual Meeting of Japan Association Mineralogical Sciences) reported that raster scanning is effective for this purpose. In this study, we will verify the temperature rise around the probe due to the electron beam using the Finite Element Method with the implicit method and assess the contribution process of beam damage.