2023 年 52 巻 1 号 論文ID: 230725
Basis, conditions, and practical techniques for scanning electron microscopy (SEM) are described, to obtain high-resolution secondary-electron images (SEIs) which give valuable information for fine morphology of mineral specimens. Although minimization of the electron-probe diameter on specimens is the primary request for high-resolution imaging, a smaller scattering volume in the specimen with a lower acceleration voltage is often important to acquire clear SEIs to show surface structures of the specimens. The operators are recommended to optimize the acceleration voltage and other operating conditions of SEM, as well as specimen preparation conditions, depending on their samples and purpose of the observation.
