研究
化合物半導体のレーザー誘起スパッタリング
1985 年 11 巻 3 号 p. 50-59
詳細
1985 年 11 巻 3 号 p. 50-59
Sputtering of compound semiconductors induced by 10 ns laser pulses from a tunable dye laser has been investigated. Laser fluence used in the present work is much below the melt threshold fluence. Experimental results show the laser-induced sputtering is not a thermal effect but an effect of dense electronic excitation. A possible mechanism of the sputtering induced by dence electronic excitation is briefly discussed.
