放射線
Online ISSN : 2758-9064
特集「放射線イメージング用検出器および検出手法の新展開」
微細加工技術を用いた放射線位置検出器の開発
越智 敦彦谷森 達西 勇二青木 俊介西 泰朗
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1999 年 25 巻 1 号 p. 3-14

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  The development of gaseous detectors has been excited again since the appearance of a MicroStrip Gas Chamber(MSGC) in 1988, which is made using a micro-electronics technology. We have developed the two-dimensional MSGC having a 10 cm square detection area and the ultra fast read-out system for a real-time X-ray imaging. The MSGC was made using Multi-Chip Module (MCM) technology, and has a very thin substrate of 17 μm, lots of thin anodes and back strips both with 200 μm pitches. This enable us to get fast digital X-ray images with recoding both a timing and an energy of each X-ray photon. In addition, an intermediate gas multiplier has been realized using a capillary plate having a conductive surface of a capillary. The MSGC combined with a conductive capillary has been operated steadily with a high gain under a high intensity. Here we also report a new approach of a X-ray crystal structure analysis using timing information obtained by the MSGC.

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