イオンプレーティング法によるTiN被膜の大気雰囲気中での熱サイクル特性
1998 年 36 巻 2 号 p. 66-72
詳細
1998 年 36 巻 2 号 p. 66-72
Ion plating technique is a well-established technology for the production of protective coatings on a wide range of substrates. There are several destructive and non-destructive testing techniques for evaluation of the quality of these coatings. These deposited from tests enable the examination of structures and properties of the coatings, such as phases in the deposits and the bond strength between the film and the substrate.
In this study, thermal cycling tests in air were performed on TiN films which were produced by ion plating technique. The microstructures of the films and failure mechanisms were investigated after the specimens were at 872, 973 and 1073K for various duration times. The thermal shock resistance of the coatings was correlated with the testing temperatures, duration times, substrates, coating process and coating parameters.
