Materials used for ultrahigh to extreme high vacuum (10-7-10-10Pa) applications are described in terms of their vacuum related properties such as outgassing and permeation characteristics. Materials discussed here are metals, glasses, ceramics, plastics and elastomers.
In order to attain ultrahigh to extremehigh vacuum, outgassing rates must be reduced to the order of 10-9-10-11Pam3/sm2. Such an order of outgassing rates is usually realized by baking at temperatures 120-300°C. The effect of baking and surface modification on the outgassing rate is given in detail for major vacuum chamber materials, stainless steels and aluminum alloys.
