Abstract
A novel micromixer is proposed, fabricated and verified. The new concept of the micromixere is to cross-link the many capillaries in three-dimensional structure. The characteristic flow behaviors are simulated by using computational fluid dynamics(CFD) software “FLUENT”. The results of the CFD shows unique mixing behavior in three-dimensionally cross-linked capillaries. The mixing performance of the micromixer is strongly influenced by controlling the three-dimensional crossing condition. The micromixer is fabricated by means of deep X-ray lithography with multi step exposure. The cross-linked capillary structures are successfully fabricated with controlled cross-link conditions. The performance of micromixer is evaluated by using a kind of enzyme reaction. By comparing mixture, mixed with cross-linked fluid filter and fluid filter without cross-linked capillaries, we found out the speeding up of the reaction by using new micromixer.