A New Trial of Resist Coating by Applying Electro-Statically Extracted Ink-Jet

Abstract

In this study, an application of electro-statically extracted ink-jet system has been tried on to the new resist coating method. This new method is based on the corpuscles state of flying resist by electro-statically extracted ink-jet. We have learned that the effectiveness of the resist coating by using electro-statically extracted ink-jet was rather reasonable of its specific application.