IEEJ Transactions on Electronics, Information and Systems
Online ISSN : 1348-8155
Print ISSN : 0385-4221
ISSN-L : 0385-4221
<Systems, Instrument, Control>
A New Trial of Resist Coating by Applying Electro-Statically Extracted Ink-Jet
Kazuhisa MatsuoMakoto FukumotoTakehiko Tomikawa
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2009 Volume 129 Issue 5 Pages 1004-1005

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Abstract
In this study, an application of electro-statically extracted ink-jet system has been tried on to the new resist coating method. This new method is based on the corpuscles state of flying resist by electro-statically extracted ink-jet. We have learned that the effectiveness of the resist coating by using electro-statically extracted ink-jet was rather reasonable of its specific application.
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© 2009 by the Institute of Electrical Engineers of Japan
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