IEEJ Transactions on Electronics, Information and Systems
Online ISSN : 1348-8155
Print ISSN : 0385-4221
ISSN-L : 0385-4221
<Electrical and Electronic Circuit, LSI>
GaN 8Gbps High-Speed Relay MMIC for Automated Test Equipment
Satoshi KoyamaTaku SatoJun'ichi OkayasuHideyuki OkabeMasayuki Kimishima
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2021 Volume 141 Issue 8 Pages 856-859

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Abstract

An 8 Gbps high-speed relay MMIC for an Automated Test Equipment (ATE) using a gallium nitride is developed and evaluated. Metal-Insulator-Semiconductor structure with a tantalum oxynitride is employed to reduce a leakage current for ATE applications. The fabricated MMIC shows 0.3 nA of the leakage current, 12 GHz of a -3 dB bandwidth, and excellent eye-opening of 8 Gbps signals with a 18-leads QFN package. The MMIC has 2.0×2.4 mm of package size and achieves higher channel density than an existing photo relay generally applied in ATE.

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© 2021 by the Institute of Electrical Engineers of Japan
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