On Judgement of Electron Escape for Evaluation of the Magnetic Confinement Effect in Simulations of Inductively Coupled Plasmas under Confronting Divergent Magnetic Fields

Abstract

Confronting divergent magnetic fields (CDMFs) applied to an inductively coupled plasma have a function to confine electrons within the source region. We discussed judgement criteria for electron escape from the source region to the diffusion region across the separatrix of the CDMFs. Passage of electron gyration center across the separatrix and collisional events in the diffusion region were newly introduced as effective criteria.