The transactions of the Institute of Electrical Engineers of Japan.A
Online ISSN : 1347-5533
Print ISSN : 0385-4205
Magnetron Sputtering of Ferromagnetic Material using a Target with Ditches
Takumi Watanabe, Tetsuya Ogushi, Tadashi Numata
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1980 Volume 100 Issue 4 Pages 249

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