The transactions of the Institute of Electrical Engineers of Japan.A
Online ISSN : 1347-5533
Print ISSN : 0385-4205
Effects of the Gas Flow Rate on Operational Characteristics of Induction-Coupled Argon Plasmas
Yukiharu Nomoto
Author information
JOURNAL FREE ACCESS

1981 Volume 101 Issue 8 Pages 421-428

Details
Download PDF (1170K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© The Institute of Electrical Engineers of Japan
Previous article Next article
Favorites & Alerts

Recently viewed articles
Predecessor

The Journal of the Institute of Electrical Engineers of Japan

Successor

IEEJ Transactions on Sensors and Micromachines

IEEJ Transactions on Industry Applications

IEEJ Transactions on Fundamentals and Materials

Share this page
feedback
 Top