The transactions of the Institute of Electrical Engineers of Japan.A
Online ISSN : 1347-5533
Print ISSN : 0385-4205
Fabrication of c-Axis Oriented AlN Films by Reactive Magnetron Sputtering
Fumio TakedaTeruki MoriTakakazu TakahashiTomonobu Hata
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1981 Volume 101 Issue 9 Pages 483-488

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