Hitachi Research Laboratory, Hitachi Ltd.
Hitachi Research Laboratory, Hitachi Ltd. Kokubu Works, Hitachi Ltd.
1982 Volume 102 Issue 5 Pages 295-302
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The Journal of the Institute of Electrical Engineers of Japan
IEEJ Transactions on Sensors and Micromachines
IEEJ Transactions on Industry Applications
IEEJ Transactions on Fundamentals and Materials
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