Physical and Electrical Properties of Diamond Thin Films by Electron Assisted Chemical Vapor Deposition

The transactions of the Institute of Electrical Engineers of Japan.A

Online ISSN : 1347-5533
Print ISSN : 0385-4205

Physical and Electrical Properties of Diamond Thin Films by Electron Assisted Chemical Vapor Deposition

Atsuhito Sawabe

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1986 Volume 106 Issue 4 Pages 179-184

DOI https://doi.org/10.1541/ieejfms1972.106.179

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