Methane Dischages and Thin Film Deposition by a Pulsed Electromagnetic Inductive Method and a Radio-Frequeacy Method

The transactions of the Institute of Electrical Engineers of Japan.A

Online ISSN : 1347-5533
Print ISSN : 0385-4205

Methane Dischages and Thin Film Deposition by a Pulsed Electromagnetic Inductive Method and a Radio-Frequeacy Method

Kenji Ebihara, Ichiro Sagara, Hisashi Oohira, Sadao Maeda

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1987 Volume 107 Issue 5 Pages 248-254

DOI https://doi.org/10.1541/ieejfms1972.107.248

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