The transactions of the Institute of Electrical Engineers of Japan.A
Online ISSN : 1347-5533
Print ISSN : 0385-4205
Preparation and Characterization of Sputtered ZrO2 Films Doped with Y2O3
Yoshiharu Onuma, Takehiko Tomura, Hiroshi Yamakawa, Masato Nakao, Kiichi Kamimura
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1989 Volume 109 Issue 7 Pages 318-322

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