The influence of strict defect control is both the enhancement of manufacturing yield and the delivery delay due to the drop of the machine operation rate. Therefore defect inspection method must be optimized for this trade-off especially for ASIC manufacturing. In the first report, we proposed a new cost model which treats not only inspection and yield model but also and workflow model. In this report, we formularize the inspection parameter dependance on manufacturing yield and machine cleaning cycle that may affect delivery time. With the formula, factory engineers can get practical information for inspection parameter optimization.
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